Inventor
BEATTIE BRUCE
US15 patents
Patents
15 patentsUS6087236AJul 11, 2000
Integrated circuit with multiple gate dielectric structures
INTEL CORP94 citations98
US6124171ASep 26, 2000
Method of forming gate oxide having dual thickness by oxidation process
INTEL CORP86 citations94
US6597046B1Jul 22, 2003
Integrated circuit with multiple gate dielectric structures
INTEL CORP38 citations92
US6465358B1Oct 15, 2002
Post etch clean sequence for making a semiconductor device
INTEL CORP47 citations92
US11342411B2May 24, 2022
Cavity spacer for nanowire transistors
INTEL CORP7 citations84
US11205715B2Dec 21, 2021
Self-aligned nanowire
INTEL CORP2 citations73
US11929396B2Mar 12, 2024
Cavity spacer for nanowire transistors
INTEL CORP2 citations72
US11869891B2Jan 9, 2024
Non-planar integrated circuit structures having mitigated source or drain etch from replacement gate process
INTEL CORP2 citations71
US11894368B2Feb 6, 2024
Gate-all-around integrated circuit structures fabricated using alternate etch selective material
INTEL CORP1 citations62
US11715787B2Aug 1, 2023
Self-aligned nanowire
INTEL CORP0 citations62
US12328905B2Jun 10, 2025
Cavity spacer for nanowire transistors
INTEL CORP0 citations61
US12302632B2May 13, 2025
Non-planar integrated circuit structures having mitigated source or drain etch from replacement gate process
INTEL CORP0 citations61
US12453115B2Oct 21, 2025
Nanowire transistor structure and method of shaping
INTEL CORP0 citations59
US11869973B2Jan 9, 2024
Nanowire transistor structure and method of shaping
INTEL CORP0 citations59
US11276691B2Mar 15, 2022
Gate-all-around integrated circuit structures having self-aligned source or drain undercut for varied widths
INTEL CORP0 citations52