Inventor

CHUANG KUO-SHENG

TW43 patents

⚠️ This page may combine multiple inventors who share the name “CHUANG KUO-SHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHUANG KUO-SHENG

TAIWAN SEMICONDUCTOR MFG CO LTD

Substrate handling contacts and methods

Mechanisms for controlling gas flow in enclosure

Substrate handling device and processing chamber

Gamma ray generator and gamma ray lithography system

Gamma ray generator, gamma ray lithography system and method of performing gamma ray lithography

Semiconductor device and method for manufacturing the same

Semiconductor device and fabrication method therefor

Method of evaluating characteristics of ion implanted sample

Wafer processing system using multi-zone chuck

Ultra-low oxygen and humility loadport and stocker system

Wafer pod handling method

System and method of cleaning FOUP

Method of trimming fin structure

Substrate handling device and processing chamber

Semiconductor integrated circuit

Conductive powder formation method and device for forming conductive powder

Silver patterning and interconnect processes

Gamma ray generator and method of generating gamma ray

Method of handling a substrate

Method of patterning material layer

Photomask

Semiconductor device having interfacial layer and high κ dielectric layer

Semiconductor device and method for manufacturing the same

Semiconductor integrated circuit

Photomask and fabrication method therefor

Conductive powder formation method, device for forming conductive powder, and method of forming semiconductor device

Method of evaluating characteristics of ion implanted sample

Semiconductor device having interfacial layer and high K dielectric layer

Photomask and method of forming the same

Semiconductor device having interfacial layer and high κ dielectric layer

Lithography device and apparatus and method for lithography device

Manufacturing method of semiconductor device

Semiconductor processing station

Semiconductor processing station, semiconductor process and method of operating semiconductor processing station

Dispensing apparatus and dispensing method

Integrated system, integrated system operation method and film treatment method

Device manufacturing cleaning process using vaporized solvent

TAIWAN SEMICONDUCTOR MFG

Method of forming undoped/in-situ doped/undoped polysilicon sandwich for floating gate application

Ion implant method for forming trench isolation for integrated circuit devices

Semiconductor substrate dry cleaning method

YEH MING-HSI

In-situ backside cleaning of semiconductor substrate

Semiconductor device cleaning method and apparatus

CHENG NAI-HAN

Wafer processing method and system using multi-zone chuck