Inventor

CHOU YOU-HUA

TW108 patents

⚠️ This page may combine multiple inventors who share the name “CHOU YOU-HUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

39 patents

US10399231B2Sep 3, 2019

Substrate handling contacts and methods

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84

US10276692B1Apr 30, 2019

Fin diode structure and methods thereof

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84

US9735050B2Aug 15, 2017

Composite contact plug structure and method of making same

TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84

US10357867B2Jul 23, 2019

Polishing system

TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83

US9536834B2Jan 3, 2017

Reverse damascene process

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82

US9272315B2Mar 1, 2016

Mechanisms for controlling gas flow in enclosure

TAIWAN SEMICONDUCTOR MFG CO LTD11 citations82

US11752638B2Sep 12, 2023

Substrate handling device and processing chamber

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US11460779B2Oct 4, 2022

Gamma ray generator and gamma ray lithography system

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US11067898B2Jul 20, 2021

Gamma ray generator, gamma ray lithography system and method of performing gamma ray lithography

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US10483115B2Nov 19, 2019

Semiconductor device and method for manufacturing the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US10297505B2May 21, 2019

Semiconductor device and fabrication method therefor

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US10276432B2Apr 30, 2019

Composite contact plug structure and method of making same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US10204807B2Feb 12, 2019

Apparatus and method for processing wafer

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US10175176B2Jan 8, 2019

Method of evaluating characteristics of ion implanted sample

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73

US10079174B2Sep 18, 2018

Composite contact plug structure and method of making same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US9984924B2May 29, 2018

Semiconductor device and formation thereof

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73

US9966339B2May 8, 2018

Barrier structure for copper interconnect

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73

US9892954B2Feb 13, 2018

Wafer processing system using multi-zone chuck

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73

US9589892B2Mar 7, 2017

Interconnect structure and method of forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73

US9460949B2Oct 4, 2016

Ultra-low oxygen and humility loadport and stocker system

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73

US10978329B2Apr 13, 2021

Wafer pod handling method

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72

US9718164B2Aug 1, 2017

Polishing system and polishing method

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72

US10190209B2Jan 29, 2019

PVD apparatus and method with deposition chamber having multiple targets and magnets

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71

US9607946B2Mar 28, 2017

Reverse damascene process

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71

US11164937B2Nov 2, 2021

Semiconductor device and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68

US11854874B2Dec 26, 2023

Metal contact structure and method of forming the same in a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63

US10985058B2Apr 20, 2021

Semiconductor device and formation thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US10910483B2Feb 2, 2021

Fin diode structure and methods thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US9530736B2Dec 27, 2016

Semiconductor device and formation thereof

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations63

US9412850B1Aug 9, 2016

Method of trimming fin structure

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations63

US12109681B2Oct 8, 2024

Substrate handling device and processing chamber

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12027424B2Jul 2, 2024

Semiconductor integrated circuit

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11819923B2Nov 21, 2023

Conductive powder formation method and device for forming conductive powder

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11681225B2Jun 20, 2023

Silver patterning and interconnect processes

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11669014B2Jun 6, 2023

Gamma ray generator and method of generating gamma ray

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11376744B2Jul 5, 2022

Method of handling a substrate

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11367616B2Jun 21, 2022

Method of patterning material layer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11358252B2Jun 14, 2022

Method of using a polishing system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11281091B2Mar 22, 2022

Photomask

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

TAIWAN SEMICONDUCTOR MFG

4 patents

US6934143B2Aug 23, 2005

Metal-insulator-metal capacitor structure

TAIWAN SEMICONDUCTOR MFG18 citations79

US7314838B2Jan 1, 2008

Method for forming a high density dielectric film by chemical vapor deposition

TAIWAN SEMICONDUCTOR MFG7 citations74

US9385080B2Jul 5, 2016

Interconnect structure and method of forming the same

TAIWAN SEMICONDUCTOR MFG4 citations73

US7226875B2Jun 5, 2007

Method for enhancing FSG film stability

TAIWAN SEMICONDUCTOR MFG2 citations63

CHOU YOU-HUA

3 patents

US8518818B2Aug 27, 2013

Reverse damascene process

CHOU YOU-HUA8 citations82

US9234278B2Jan 12, 2016

CVD conformal vacuum/pumping guiding design

CHOU YOU-HUA3 citations72

US8742776B2Jun 3, 2014

Mechanisms for resistivity measurement of bump structures

CHOU YOU-HUA4 citations67

TSAI MING-CHIN

1 patent

US8926806B2Jan 6, 2015

Shielding design for metal gap fill

TSAI MING-CHIN6 citations82

CHENG NAI-HAN

1 patent

US8709528B2Apr 29, 2014

Wafer processing method and system using multi-zone chuck

CHENG NAI-HAN6 citations82

CHOU YOU HUA

1 patent

US9976215B2May 22, 2018

Semiconductor film formation apparatus and process

CHOU YOU HUA6 citations71

LEE CHIH TSUNG

1 patent

US9982340B2May 29, 2018

Shower head apparatus and method for controlling plasma or gas distribution

LEE CHIH TSUNG2 citations65

Showing the top 50 of 108 patents by PatentIndex Score.