Inventor
KIM TAE SHIN
KR14 patents
⚠️ This page may combine multiple inventors who share the name “KIM TAE SHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
11 patentsUS11923213B2Mar 5, 2024
Substrate heating unit, substrate processing apparatus, and substrate processing method
SEMES CO LTD3 citations72
US12224200B2Feb 11, 2025
Substrate treating apparatus
SEMES CO LTD1 citations62
US12381097B2Aug 5, 2025
Substrate treating apparatus
SEMES CO LTD0 citations60
US12094733B2Sep 17, 2024
Substrate treatment apparatus
SEMES CO LTD0 citations60
US12553138B2Feb 17, 2026
Apparatus and method of processing substrate
SEMES CO LTD0 citations59
US11495467B2Nov 8, 2022
Method and apparatus for etching thin layer
SEMES CO LTD1 citations59
US12550661B2Feb 10, 2026
Apparatus for treating substrate
SEMES CO LTD0 citations50
US12525474B2Jan 13, 2026
Apparatus for treating substrate and method for treating substrate
SEMES CO LTD0 citations50
US11772198B2Oct 3, 2023
Apparatus including laser heating for etching thin layer
SEMES CO LTD0 citations49
US12055857B2Aug 6, 2024
Mask processing apparatus and substrate processing apparatus
SEMES CO LTD0 citations47
US11715651B2Aug 1, 2023
Apparatus for and method of treating substrate
SEMES CO LTD0 citations47