Inventor
KUO TA-HAO
TW8 patents
Patents
8 patentsUS11739423B2Aug 29, 2023
Atomic layer deposition apparatus for coating on fine powders
SKY TECH INC10 citations83
US11427910B2Aug 30, 2022
Atomic layer deposition equipment capable of reducing precursor deposition and atomic layer deposition process method using the same
SKY TECH INC2 citations71
US11332826B1May 17, 2022
Atomic layer deposition equipment and process method
SKY TECH INC2 citations71
US11476100B1Oct 18, 2022
Shielding mechanism and substrate-processing chamber with the same
SKY TECH INC1 citations61
US12403685B2Sep 2, 2025
Plate cooling device and de-bonding station with plate cooling device
SKY TECH INC0 citations50
US11846022B2Dec 19, 2023
Thin-film-deposition machine
SKY TECH INC0 citations50
US12421600B2Sep 23, 2025
2-in-1 (UV-assisted and plasma enhanced) ALD and ALE chamber
SKY TECH INC0 citations48
US12224159B1Feb 11, 2025
Gas mixing method to enhance plasma
SKY TECH INC0 citations44