Inventor
KAPLAN LEON H
US8 patents
Patents
8 patentsUS5254202AOct 19, 1993
Fabrication of laser ablation masks by wet etching
IBM30 citations91
US4307178ADec 22, 1981
Plasma develoment of resists
IBM25 citations81
US4259430AMar 31, 1981
Photoresist O-quinone diazide containing composition and resist mask formation process
IBM25 citations81
US4007047AFeb 8, 1977
Modified processing of positive photoresists
IBM30 citations81
US4036644AJul 19, 1977
Photoresist process and photosensitive O-quinone diazide article with aliphatic carboxylic acid as adhesion promotor
IBM20 citations74
US4414314ANov 8, 1983
Resolution in optical lithography
IBM12 citations73
US5573875ANov 12, 1996
Laser ablation mask and method of fabrication
IBM17 citations71
US4497891AFeb 5, 1985
Dry-developed, negative working electron resist system
IBM3 citations62