Inventor
FUKUSHIMA YOSHIMASA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “FUKUSHIMA YOSHIMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
6 patentsUS4565601AJan 21, 1986
Method and apparatus for controlling sample temperature
HITACHI LTD451 citations97
US4824309AApr 25, 1989
Vacuum processing unit and apparatus
HITACHI LTD96 citations95
US6281024B1Aug 28, 2001
Semiconductor device inspection and analysis method and its apparatus and a method for manufacturing a semiconductor device
HITACHI LTD17 citations84
US6744054B2Jun 1, 2004
Evacuation use sample chamber and circuit pattern forming apparatus using the same
HITACHI LTD6 citations62
US6446950B2Sep 10, 2002
Travelling worktable apparatus
HITACHI LTD4 citations59
US6659441B2Dec 9, 2003
Travelling worktable apparatus
HITACHI LTD1 citations49
HITACHI HIGH TECH CORP
3 patentsUS10056226B2Aug 21, 2018
Charged particle beam apparatus and vibration damper for charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations69
US7276709B2Oct 2, 2007
System and method for electron-beam lithography
HITACHI HIGH TECH CORP2 citations62
US6794665B2Sep 21, 2004
Electron beam drawing apparatus
HITACHI HIGH TECH CORP2 citations62