Inventor

KOSHINAKA MASAO

JP6 patents

Patents

6 patents

US5317618AMay 31, 1994

Light transmission type vacuum separating window and soft X-ray transmitting window

MITSUBISHI ELECTRIC CORP54 citations94

US5024182AJun 18, 1991

Thin film forming apparatus having a gas flow settling device

MITSUBISHI ELECTRIC CORP40 citations92

US7061345B2Jun 13, 2006

Filter circuit with series and parallel elements

MITSUBISHI ELECTRIC CORP12 citations82

US5030842AJul 9, 1991

Fine-particle measuring apparatus

MITSUBISHI ELECTRIC CORP12 citations73

US5008558AApr 16, 1991

System for detecting minute particles on or above a substrate

MITSUBISHI ELECTRIC CORP10 citations73

US5305366AApr 19, 1994

Thin film forming apparatus

MITSUBISHI ELECTRIC CORP9 citations72