Inventor
LU NENG-HSING
TW8 patents
⚠️ This page may combine multiple inventors who share the name “LU NENG-HSING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS4956197ASep 11, 1990
Plasma conditioning of a substrate for electroless plating
IBM23 citations92
US5061359AOct 29, 1991
Plasma processing apparatus including three bus structures
IBM26 citations91
US4618477AOct 21, 1986
Uniform plasma for drill smear removal reactor
IBM16 citations72
US4601807AJul 22, 1986
Reactor for plasma desmear of high aspect ratio hole
IBM12 citations65