Inventor
KLEIN RICH
US12 patents
⚠️ This page may combine multiple inventors who share the name “KLEIN RICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
11 patentsUS5705430AJan 6, 1998
Dual damascene with a sacrificial via fill
ADVANCED MICRO DEVICES INC173 citations99
US5614765AMar 25, 1997
Self aligned via dual damascene
ADVANCED MICRO DEVICES INC172 citations99
US5795823AAug 18, 1998
Self aligned via dual damascene
ADVANCED MICRO DEVICES INC114 citations98
US5691238ANov 25, 1997
Subtractive dual damascene
ADVANCED MICRO DEVICES INC68 citations96
US5686354ANov 11, 1997
Dual damascene with a protective mask for via etching
ADVANCED MICRO DEVICES INC80 citations96
US5776834AJul 7, 1998
Bias plasma deposition for selective low dielectric insulation
ADVANCED MICRO DEVICES INC45 citations95
US5990557ANov 23, 1999
Bias plasma deposition for selective low dielectric insulation
ADVANCED MICRO DEVICES INC18 citations92
US5955786ASep 21, 1999
Semiconductor device using uniform nonconformal deposition for forming low dielectric constant insulation between certain conductive lines
ADVANCED MICRO DEVICES INC20 citations92
US5691573ANov 25, 1997
Composite insulation with a dielectric constant of less than 3 in a narrow space separating conductive lines
ADVANCED MICRO DEVICES INC44 citations92
US6051882AApr 18, 2000
Subtractive dual damascene semiconductor device
ADVANCED MICRO DEVICES INC17 citations90
US6048802AApr 11, 2000
Selective nonconformal deposition for forming low dielectric insulation between certain conductive lines
ADVANCED MICRO DEVICES INC15 citations73