Inventor
NARIMATSU KOICHIRO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “NARIMATSU KOICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
10 patentsUS6323560B1Nov 27, 2001
Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photo mask and method of exposure thereof
MITSUBISHI ELECTRIC CORP63 citations95
US6114072ASep 5, 2000
Reticle having interlocking dicing regions containing monitor marks and exposure method and apparatus utilizing same
MITSUBISHI ELECTRIC CORP47 citations92
US5646452AJul 8, 1997
Registration accuracy measurement mark for semiconductor devices
MITSUBISHI ELECTRIC CORP34 citations92
US5892291AApr 6, 1999
Registration accuracy measurement mark
MITSUBISHI ELECTRIC CORP15 citations81
US6596603B1Jul 22, 2003
Semiconductor device and manufacturing method thereof, and registration accuracy measurement enhancement method
MITSUBISHI ELECTRIC CORP6 citations73
US6068952AMay 30, 2000
Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photomask and method of exposure thereof
MITSUBISHI ELECTRIC CORP4 citations73
US5991007ANov 23, 1999
Step and scan exposure system and semiconductor device manufactured using said system
MITSUBISHI ELECTRIC CORP9 citations73
US5869906AFeb 9, 1999
Registration accuracy measurement mark for semiconductor devices
MITSUBISHI ELECTRIC CORP7 citations73
US6667505B2Dec 23, 2003
Semiconductor device having a plurality of capacitors aligned at regular intervals
MITSUBISHI ELECTRIC CORP4 citations62
US6607992B2Aug 19, 2003
Antireflection coating and semiconductor device manufacturing method
MITSUBISHI ELECTRIC CORP1 citations51
RENESAS TECH CORP
2 patentsUS6849957B2Feb 1, 2005
Photomask including auxiliary mark area, semiconductor device and manufacturing method thereof
RENESAS TECH CORP22 citations92
US6943458B2Sep 13, 2005
Semiconductor device and manufacturing method thereof, and registration accuracy measurement enhancement method
RENESAS TECH CORP2 citations62