Inventor
YAMASHITA SHIGENORI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “YAMASHITA SHIGENORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
4 patentsUS6323560B1Nov 27, 2001
Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photo mask and method of exposure thereof
MITSUBISHI ELECTRIC CORP63 citations95
US6617080B1Sep 9, 2003
Photomask, semiconductor device, and method for exposing through photomask
MITSUBISHI ELECTRIC CORP26 citations90
US5892291AApr 6, 1999
Registration accuracy measurement mark
MITSUBISHI ELECTRIC CORP15 citations81
US6068952AMay 30, 2000
Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photomask and method of exposure thereof
MITSUBISHI ELECTRIC CORP4 citations73