Inventor
LIN BIH-TIAO
TW16 patents
⚠️ This page may combine multiple inventors who share the name “LIN BIH-TIAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VANGUARD INT SEMICONDUCT CORP
7 patentsUS6071789AJun 6, 2000
Method for simultaneously fabricating a DRAM capacitor and metal interconnections
VANGUARD INT SEMICONDUCT CORP265 citations98
US6140240AOct 31, 2000
Method for eliminating CMP induced microscratches
VANGUARD INT SEMICONDUCT CORP19 citations92
US5888124AMar 30, 1999
Apparatus for polishing and cleaning a wafer
VANGUARD INT SEMICONDUCT CORP30 citations92
US6180489B1Jan 30, 2001
Formation of finely controlled shallow trench isolation for ULSI process
VANGUARD INT SEMICONDUCT CORP12 citations73
US6054017AApr 25, 2000
Chemical mechanical polishing pad with controlled polish rate
VANGUARD INT SEMICONDUCT CORP10 citations73
US6037259AMar 14, 2000
Method for forming identifying characters on a silicon wafer
VANGUARD INT SEMICONDUCT CORP5 citations62
US6089969AJul 18, 2000
Powder-proof apparatus for a PECVD reactor chamber
VANGUARD INT SEMICONDUCT CORP0 citations40
TAIWAN SEMICONDUCTOR MFG
7 patentsUS6524950B1Feb 25, 2003
Method of fabricating copper damascene
TAIWAN SEMICONDUCTOR MFG28 citations92
US6604849B2Aug 12, 2003
Slurry dilution system with an ultrasonic vibrator capable of in-situ adjustment of slurry concentration
TAIWAN SEMICONDUCTOR MFG21 citations85
US6821895B2Nov 23, 2004
Dynamically adjustable slurry feed arm for wafer edge profile improvement in CMP
TAIWAN SEMICONDUCTOR MFG15 citations83
US6660629B2Dec 9, 2003
Chemical mechanical polishing method for fabricating copper damascene structure
TAIWAN SEMICONDUCTOR MFG2 citations62
US6454917B1Sep 24, 2002
High throughput and high performance copper electroplating tool
TAIWAN SEMICONDUCTOR MFG0 citations51
US7685667B2Mar 30, 2010
Post-CMP cleaning system
TAIWAN SEMICONDUCTOR MFG1 citations42
US6218307B1Apr 17, 2001
Method of fabricating shallow trench isolation structure
TAIWAN SEMICONDUCTOR MFG0 citations41