Inventor
USUI KATSUAKI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “USUI KATSUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
14 patentsUS5641054AJun 24, 1997
Magnetic levitation conveyor apparatus
EBARA CORP182 citations98
US6474949B1Nov 5, 2002
Evacuating unit with reduced diameter exhaust duct
EBARA CORP112 citations96
US5814913ASep 29, 1998
Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor
EBARA CORP22 citations92
US5779453AJul 14, 1998
Vacuum pump motor arrangement having reduced heat generation
EBARA CORP52 citations92
US6164945ADec 26, 2000
Vacuum pump rotor and method of manufacturing the same
EBARA CORP20 citations91
US5816782AOct 6, 1998
Multistage positive-displacement vacuum pump
EBARA CORP24 citations91
US7360454B2Apr 22, 2008
Flowmeter having a float and a displacement sensor
EBARA CORP18 citations82
US4943214AJul 24, 1990
Two-shaft type rotary machine having a tip circle diameter to shaft diameter within a certain range
EBARA CORP20 citations77
US6761542B2Jul 13, 2004
Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor
EBARA CORP6 citations73
US6447271B2Sep 10, 2002
Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor
EBARA CORP5 citations73
US6183218B1Feb 6, 2001
Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor
EBARA CORP10 citations73
US6088508AJul 11, 2000
Method of operating vacuum pump
EBARA CORP9 citations71
US12577952B2Mar 17, 2026
Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method
EBARA CORP0 citations46
US11946470B2Apr 2, 2024
Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method
EBARA CORP0 citations46