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Inventor
VELLANKI RAVI
US
4 patents
⚠️ This page may combine multiple inventors who share the name “VELLANKI RAVI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patents
US12203168B2
Jan 21, 2025
Metal deposition
LAM RES CORP
1 citations
60
US12530021B2
Jan 20, 2026
Performance predictors for semiconductor-manufacturing processes
LAM RES CORP
0 citations
47
US11725285B2
Aug 15, 2023
Preventing deposition on pedestal in semiconductor substrate processing
LAM RES CORP
0 citations
42
NOVELLUS SYSTEMS INC
1 patent
US6333268B1
Dec 25, 2001
Method and apparatus for removing post-etch residues and other adherent matrices
NOVELLUS SYSTEMS INC
117 citations
95