Inventor
ARAKAWA KIYOSHI
JP7 patents
Patents
7 patentsUS6757048B2Jun 29, 2004
Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factory
CANON KK58 citations94
US6356338B2Mar 12, 2002
Semiconductor production system with an in-line subsystem
CANON KK19 citations90
US7057701B2Jun 6, 2006
Exposure apparatus
CANON KK15 citations81
US6924877B2Aug 2, 2005
Chemical filter arrangement for a semiconductor manufacturing apparatus
CANON KK11 citations72
US6891593B2May 10, 2005
Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factory
CANON KK9 citations71
US7186285B2Mar 6, 2007
Chemical filter arrangement for a semiconductor manufacturing apparatus
CANON KK4 citations61
US7034918B2Apr 25, 2006
Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factory
CANON KK4 citations60