Inventor
PARK SUN-HOO
KR10 patents
Patents
10 patentsUS6464794B1Oct 15, 2002
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates
SAMSUNG ELECTRONICS CO LTD75 citations94
US6756292B2Jun 29, 2004
Method of forming a quantum dot and a gate electrode using the same
SAMSUNG ELECTRONICS CO LTD46 citations92
US5544771AAug 13, 1996
Method for manufacturing a collimator
SAMSUNG ELECTRONICS CO LTD35 citations92
US7321146B2Jan 22, 2008
DRAM memory cell and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD11 citations83
US7030439B2Apr 18, 2006
DRAM memory cell and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD11 citations83
US6774048B2Aug 10, 2004
Method of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD9 citations72
US6797109B2Sep 28, 2004
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates
SAMSUNG ELECTRONICS CO LTD7 citations71
US7749846B2Jul 6, 2010
Method of forming contact structure and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations62
US6372555B1Apr 16, 2002
Semiconductor integrated circuit device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD6 citations62
US7629215B2Dec 8, 2009
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD1 citations50