P

Inventor

JACQUES ROBERT N

US35 patents
⚠️ This page may combine multiple inventors who share the name “JACQUES ROBERT N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

26 patents
US6690704B2Feb 10, 2004

Control system for a two chamber gas discharge laser

CYMER INC128 citations98
US7164144B2Jan 16, 2007

EUV light source

CYMER INC113 citations97
US7087914B2Aug 8, 2006

High repetition rate laser produced plasma EUV light source

CYMER INC109 citations97
US6853653B2Feb 8, 2005

Laser spectral engineering for lithographic process

CYMER INC74 citations97
US6532247B2Mar 11, 2003

Laser wavelength control unit with piezoelectric driver

CYMER INC79 citations97
US7382815B2Jun 3, 2008

Laser spectral engineering for lithographic process

CYMER INC14 citations92
US7079564B2Jul 18, 2006

Control system for a two chamber gas discharge laser

CYMER INC26 citations92
US7039086B2May 2, 2006

Control system for a two chamber gas discharge laser

CYMER INC32 citations92
US6598322B2Jul 29, 2003

Shoe with quick tightening upper

CYMER INC45 citations90
US7830934B2Nov 9, 2010

Multi-chamber gas discharge laser bandwidth control through discharge timing

CYMER INC13 citations84
US7822084B2Oct 26, 2010

Method and apparatus for stabilizing and tuning the bandwidth of laser light

CYMER INC17 citations84
US6650666B2Nov 18, 2003

Laser wavelength control unit with piezoelectric driver

CYMER INC19 citations83
US7741639B2Jun 22, 2010

Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control

CYMER INC12 citations82
US7835414B2Nov 16, 2010

Laser gas injection system

CYMER INC13 citations81
US7756171B2Jul 13, 2010

Method and apparatus for laser control in a two chamber gas discharge laser

CYMER INC2 citations63
US7116695B2Oct 3, 2006

Laser output light pulse beam parameter transient correction system

CYMER INC4 citations63
US6872961B2Mar 29, 2005

Vibration control utilizing signal detrending

CYMER INC6 citations63
USRE42588EAug 2, 2011

Control system for a two chamber gas discharge laser system

CYMER INC5 citations62
US7830942B2Nov 9, 2010

Ultraviolet laser light source pulse energy control system

CYMER INC3 citations62
US7596164B2Sep 29, 2009

Control system for a two chamber gas discharge laser

CYMER INC5 citations62
US7298770B2Nov 20, 2007

Laser spectral engineering for lithographic process

CYMER INC4 citations62
US7852889B2Dec 14, 2010

Active spectral control of DUV light source

CYMER INC3 citations60
US7643522B2Jan 5, 2010

Method and apparatus for gas discharge laser bandwidth and center wavelength control

CYMER INC2 citations60
US7643528B2Jan 5, 2010

Immersion lithography laser light source with pulse stretcher

CYMER INC6 citations57
US7751453B2Jul 6, 2010

Method and apparatus for laser control in a two chamber gas discharge laser

CYMER INC0 citations52
US7720120B2May 18, 2010

Method and apparatus for laser control in a two chamber gas discharge laser

CYMER INC0 citations42

ACTIVE CONTROL EXPERTS INC

6 patents

DELPHI TECH INC

1 patent

JACQUES ROBERT N

1 patent

DUNSTAN WAYNE J

1 patent