Inventor
RULE JOHN A
US14 patents
⚠️ This page may combine multiple inventors who share the name “RULE JOHN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
13 patentsUS6690704B2Feb 10, 2004
Control system for a two chamber gas discharge laser
CYMER INC128 citations98
US6853653B2Feb 8, 2005
Laser spectral engineering for lithographic process
CYMER INC74 citations97
US6563128B2May 13, 2003
Base stabilization system
CYMER INC55 citations94
US7382815B2Jun 3, 2008
Laser spectral engineering for lithographic process
CYMER INC14 citations92
US7079564B2Jul 18, 2006
Control system for a two chamber gas discharge laser
CYMER INC26 citations92
US7039086B2May 2, 2006
Control system for a two chamber gas discharge laser
CYMER INC32 citations92
US7209507B2Apr 24, 2007
Method and apparatus for controlling the output of a gas discharge MOPA laser system
CYMER INC13 citations83
US6650666B2Nov 18, 2003
Laser wavelength control unit with piezoelectric driver
CYMER INC19 citations83
US6963595B2Nov 8, 2005
Automatic gas control system for a gas discharge laser
CYMER INC20 citations81
USRE42588EAug 2, 2011
Control system for a two chamber gas discharge laser system
CYMER INC5 citations62
US7596164B2Sep 29, 2009
Control system for a two chamber gas discharge laser
CYMER INC5 citations62
US7298770B2Nov 20, 2007
Laser spectral engineering for lithographic process
CYMER INC4 citations62
US7277464B2Oct 2, 2007
Method and apparatus for controlling the output of a gas discharge laser system
CYMER INC6 citations57