Inventor
PALENSCHAT FREDERICK A
US4 patents
⚠️ This page may combine multiple inventors who share the name “PALENSCHAT FREDERICK A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
3 patentsUS6532247B2Mar 11, 2003
Laser wavelength control unit with piezoelectric driver
CYMER INC79 citations97
US6914919B2Jul 5, 2005
Six to ten KHz, or greater gas discharge laser system
CYMER INC34 citations92
US6650666B2Nov 18, 2003
Laser wavelength control unit with piezoelectric driver
CYMER INC19 citations83