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Inventor

BAKLANOV MIKHAIL RODIONOVICH

BE11 patents
⚠️ This page may combine multiple inventors who share the name “BAKLANOV MIKHAIL RODIONOVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IMEC INTER UNI MICRO ELECTR

6 patents
US6635964B2Oct 21, 2003

Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof

IMEC INTER UNI MICRO ELECTR25 citations92
US6662631B2Dec 16, 2003

Method and apparatus for characterization of porous films

IMEC INTER UNI MICRO ELECTR34 citations90
US6255227B1Jul 3, 2001

Etching process of CoSi2 layers

IMEC INTER UNI MICRO ELECTR17 citations89
US6900140B2May 31, 2005

Anisotropic etching of organic-containing insulating layers

IMEC INTER UNI MICRO ELECTR6 citations73
US6844267B1Jan 18, 2005

Anisotropic etching of organic-containing insulating layers

IMEC INTER UNI MICRO ELECTR10 citations73
US6319736B1Nov 20, 2001

Apparatus and method for determining porosity

IMEC INTER UNI MICRO ELECTR13 citations71

IMEC VZW

3 patents
US6245489B1Jun 12, 2001

Fluorinated hard mask for micropatterning of polymers

IMEC VZW26 citations90
US6153484ANov 28, 2000

Etching process of CoSi2 layers

IMEC VZW36 citations89
US7042091B2May 9, 2006

Fluorinated hard mask for micropatterning of polymers

IMEC VZW7 citations71

INTERUNIVERSITIAR MICROELEKTRO

1 patent
US6323555B1Nov 27, 2001

Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof

INTERUNIVERSITIAR MICROELEKTRO27 citations89

INTERUNIVERSITAIR MICROELECKTR

1 patent
US6435008B2Aug 20, 2002

Apparatus and method for determining porosity

INTERUNIVERSITAIR MICROELECKTR21 citations86