Inventor
ZINN SHUN-YONG
KR5 patents
⚠️ This page may combine multiple inventors who share the name “ZINN SHUN-YONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS7061582B2Jun 13, 2006
Exposure apparatus including micro mirror array and exposure method using the same
SAMSUNG ELECTRONICS CO LTD94 citations96
US6835507B2Dec 28, 2004
Mask for use in measuring flare, method of manufacturing the mask, method of identifying flare-affected region on wafer, and method of designing new mask to correct for flare
SAMSUNG ELECTRONICS CO LTD19 citations82
US7376543B2May 20, 2008
Simulation method and system for design of aperture in exposure apparatus and recording medium in which the simulation method is recorded
SAMSUNG ELECTRONICS CO LTD7 citations70
US7393615B2Jul 1, 2008
Mask for use in measuring flare, method of manufacturing the mask, method of identifying flare-affected region on wafer, and method of designing new mask to correct for flare
SAMSUNG ELECTRONICS CO LTD2 citations60