P

Inventor

YAMADA TAKAKAZU

JP9 patents
⚠️ This page may combine multiple inventors who share the name “YAMADA TAKAKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAMADA TAKAKAZU

4 patents
US8262798B2Sep 11, 2012

Shower head, device and method for manufacturing thin films

YAMADA TAKAKAZU6 citations70
US8197599B2Jun 12, 2012

Gas head and thin-film manufacturing apparatus

YAMADA TAKAKAZU5 citations60
US8118935B2Feb 21, 2012

Mixing box, and apparatus and method for producing films

YAMADA TAKAKAZU2 citations60
US8747555B2Jun 10, 2014

Thin film production apparatus and inner block for thin film production apparatus

YAMADA TAKAKAZU2 citations57

ULVAC INC

3 patents
US6933010B2Aug 23, 2005

Mixer, and device and method for manufacturing thin-film

ULVAC INC16 citations91
US7618493B2Nov 17, 2009

Device and method for manufacturing thin films

ULVAC INC17 citations82
US11189482B2Nov 30, 2021

Thin film formation method

ULVAC INC0 citations51

MASUDA TAKESHI

1 patent
US8591655B2Nov 26, 2013

Apparatus for the preparation of film

MASUDA TAKESHI6 citations71

UCHIDA HIROTO

1 patent
US8168001B2May 1, 2012

Film-forming apparatus and film-forming method

UCHIDA HIROTO3 citations59