Inventor

KAJINUMA MASAHIKO

JP7 patents

⚠️ This page may combine multiple inventors who share the name “KAJINUMA MASAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC INC

2 patents

US6933010B2Aug 23, 2005

Mixer, and device and method for manufacturing thin-film

ULVAC INC16 citations91

US7618493B2Nov 17, 2009

Device and method for manufacturing thin films

ULVAC INC17 citations82

MASUDA TAKESHI

2 patents

US8591655B2Nov 26, 2013

Apparatus for the preparation of film

MASUDA TAKESHI6 citations71

US9145605B2Sep 29, 2015

Thin-film forming method and thin-film forming apparatus

MASUDA TAKESHI2 citations56

YAMADA TAKAKAZU

2 patents

US8262798B2Sep 11, 2012

Shower head, device and method for manufacturing thin films

YAMADA TAKAKAZU6 citations70

US8118935B2Feb 21, 2012

Mixing box, and apparatus and method for producing films

YAMADA TAKAKAZU2 citations60

UCHIDA HIROTO

1 patent

US8168001B2May 1, 2012

Film-forming apparatus and film-forming method

UCHIDA HIROTO3 citations59