Inventor

SUU KOUKOU

JP23 patents

⚠️ This page may combine multiple inventors who share the name “SUU KOUKOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUU KOUKOU

ULVAC INC

Mixer, and device and method for manufacturing thin-film

Etching method and system

Device and method for manufacturing thin films

Sputtering apparatus

Multi-layered film and method of manufacturing the same

Ashing device

Multi-layered film, method of manufacturing the same, and manufacturing apparatus of the same

MASUDA TAKESHI

Apparatus for the preparation of film

Thin-film forming method and thin-film forming apparatus

YAMADA TAKAKAZU

Shower head, device and method for manufacturing thin films

Mixing box, and apparatus and method for producing films

ULVAC TECH INC

Multifunctional engineered particle for a secondary battery and method of manufacturing the same

Multifunctional engineered particle for a secondary battery and method of manufacturing the same

UEDA MASAHISA

Ashing apparatus

Dry cleaning method for plasma processing apparatus

MORIKAWA YASUHIRO

Etching method and system

Etching method

NISHIOKA YUTAKA

Resistance change element and method for producing the same

Method of manufacturing variable resistance element and apparatus for manufacturing the same

RAMTRON INT CORP

High temperature deposition of Pt/TiOx for bottom electrodes

FUKUDA NATSUKI

Resistance change device, and method for producing same

UCHIDA HIROTO

Film-forming apparatus and film-forming method

IBM

Method for manufacturing phase change memory