Inventor
YANG SEUNG-GIL
KR7 patents
Patents
7 patentsUS7045842B2May 16, 2006
Integrated circuit devices having self-aligned contact structures
SAMSUNG ELECTRONICS CO LTD6 citations73
US6955983B2Oct 18, 2005
Methods of forming metal interconnections of semiconductor devices by treating a barrier metal layer
SAMSUNG ELECTRONICS CO LTD9 citations73
US7285493B2Oct 23, 2007
Methods of forming a metal layer using transition metal precursors
SAMSUNG ELECTRONICS CO LTD2 citations62
US7507627B2Mar 24, 2009
Method of fabricating nonvolatile memory device
SAMSUNG ELECTRONICS CO LTD3 citations60
US7410892B2Aug 12, 2008
Methods of fabricating integrated circuit devices having self-aligned contact structures
SAMSUNG ELECTRONICS CO LTD1 citations52
US7759248B2Jul 20, 2010
Semiconductor memory device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD1 citations51
US7384866B2Jun 10, 2008
Methods of forming metal interconnections of semiconductor devices by treating a barrier metal layer
SAMSUNG ELECTRONICS CO LTD1 citations51