Inventor
KANG MYUNG-AH
KR4 patents
Patents
4 patentsUS7338736B2Mar 4, 2008
Method of fabricating a phase shift mask
SAMSUNG ELECTRONICS CO LTD4 citations59
US7112390B2Sep 26, 2006
Method of manufacturing chromeless phase shift mask
SAMSUNG ELECTRONICS CO LTD5 citations59
US7541118B2Jun 2, 2009
Phase shift mask
SAMSUNG ELECTRONICS CO LTD0 citations48
US7100322B2Sep 5, 2006
Method of manufacturing an alternating phase shift mask
SAMSUNG ELECTRONICS CO LTD0 citations38