Inventor

SHIN IN-KYUN

KR18 patents

⚠️ This page may combine multiple inventors who share the name “SHIN IN-KYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIN IN-KYUN

SAMSUNG ELECTRONICS CO LTD

Methods of forming half-tone phase-shift masks with reduced susceptiblity to parasitic sputtering

Method of correcting mask pattern and method of manufacturing reticle

Photomask for off-axis illumination and method of fabricating the same

Methods of fabricating phase shift masks by controlling exposure doses

Half tone phase shift masks with staircase regions and methods of fabricating the same

Methods, systems and computer program products for correcting photomask using aerial images and boundary regions

Method of fabricating a phase shift mask

Method of manufacturing chromeless phase shift mask

Photo mask capable of improving resolution by utilizing polarization of light and method of manufacturing the same

Reference pattern for creating a defect recognition level, method of fabricating the same and method of inspecting defects using the same

Masks each having a central main pattern region and a peripheral phantom pattern region with light-transmitting features in both pattern regions having the shame shape and pitch and methods of manufacturing the same

Phase shift mask

Wave guided alternating phase shift mask and fabrication method thereof

Exposure method using control of settling times and methods of manufacturing integrated circuit devices by using the same

Method of manufacturing an alternating phase shift mask

Method of fabricating chrome-less phase shift mask

CHOI JIN

Exposure methods using e-beams and methods of manufacturing masks and semiconductor devices therefrom

KIM SUNG-HYUCK

Pellicle having buffer zone and photomask structure having pellicle