Inventor
MATSUMARU SHOGO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “MATSUMARU SHOGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
10 patentsUS7482108B2Jan 27, 2009
Polymer compound, acid generator, positive resist composition, and method for formation of resist patterns
TOKYO OHKA KOGYO CO LTD92 citations97
US7592123B2Sep 22, 2009
Resin for photoresist composition, photoresist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD5 citations73
US10324377B2Jun 18, 2019
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations72
US10101658B2Oct 16, 2018
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD6 citations72
US7932013B2Apr 26, 2011
Pattern coating material and pattern forming method
TOKYO OHKA KOGYO CO LTD3 citations62
US7851127B2Dec 14, 2010
Polymer compound, positive resist composition and resist pattern forming method
TOKYO OHKA KOGYO CO LTD2 citations62
US7829259B2Nov 9, 2010
Resin for photoresist composition, photoresist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations62
US8034536B2Oct 11, 2011
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD4 citations61
US7943284B2May 17, 2011
Compound, dissolution inhibitor, positive type resist composition, and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations52
US8349543B2Jan 8, 2013
Pattern-forming method, metal oxide film-forming material and method for using the metal oxide film-forming material
TOKYO OHKA KOGYO CO LTD0 citations41