Inventor
LARSON CARL E
US12 patents
⚠️ This page may combine multiple inventors who share the name “LARSON CARL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
11 patentsUS4760013AJul 26, 1988
Sulfonium salt photoinitiators
IBM221 citations98
US5096737AMar 17, 1992
Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films
IBM71 citations96
US9255194B2Feb 9, 2016
Methods and materials for depolymerizing polyesters
IBM27 citations93
US5220044AJun 15, 1993
Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films
IBM50 citations92
US5407710AApr 18, 1995
Laser interconnection of circuits on transparent substrate
IBM20 citations91
US9914816B2Mar 13, 2018
Methods and materials for depolymerizing polyesters
IBM15 citations83
US7767385B2Aug 3, 2010
Method for lithography for optimizing process conditions
IBM7 citations71
US4775608AOct 4, 1988
Generation of capacitive servo patterns on magnetic storage disks
IBM10 citations71
US8034532B2Oct 11, 2011
High contact angle topcoat material and use thereof in lithography process
IBM4 citations62
US7807340B2Oct 5, 2010
Photoresists for visible light imaging
IBM1 citations52
US7354692B2Apr 8, 2008
Photoresists for visible light imaging
IBM1 citations52