Inventor

VISWANATHAN RAMAN G

US3 patents

Patents

3 patents

US5051598ASep 24, 1991

Method for correcting proximity effects in electron beam lithography

IBM97 citations91

US7767385B2Aug 3, 2010

Method for lithography for optimizing process conditions

IBM7 citations71

US7659050B2Feb 9, 2010

High resolution silicon-containing resist

IBM3 citations58