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Inventor
YONEMURA TAISUKE
JP
6 patents
⚠️ This page may combine multiple inventors who share the name “YONEMURA TAISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASAHI GLASS CO LTD
2 patents
US7322368B2
Jan 29, 2008
Plasma cleaning gas and plasma cleaning method
ASAHI GLASS CO LTD
3 citations
61
US6787053B2
Sep 7, 2004
Cleaning gases and etching gases
ASAHI GLASS CO LTD
5 citations
60
NAT INST OF ADVANCED IND SCIEN
2 patents
US7332628B2
Feb 19, 2008
Process for producing carbonyl fluoride
NAT INST OF ADVANCED IND SCIEN
1 citations
50
US7138364B2
Nov 21, 2006
Cleaning gas and etching gas
NAT INST OF ADVANCED IND SCIEN
0 citations
50
KANTO DENKA KOGYO KK
1 patent
US7919141B2
Apr 5, 2011
Processes and equipments for preparing F2-containing gases, as well as process and equipments for modifying the surfaces of articles
KANTO DENKA KOGYO KK
8 citations
80
SAKAI KATSUO
1 patent
US8277560B2
Oct 2, 2012
CVD apparatus and method of cleaning the CVD apparatus
SAKAI KATSUO
2 citations
55