P

Inventor

NOZAWA NAOYUKI

JP10 patents
⚠️ This page may combine multiple inventors who share the name “NOZAWA NAOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ANELVA CORP

4 patents
US5976255ANov 2, 1999

Substrate holder for reducing non-uniform film characteristics resulting from support structures

ANELVA CORP44 citations91
US6202592B1Mar 20, 2001

Substrate holder

ANELVA CORP11 citations72
US6030455AFeb 29, 2000

Substrate holder

ANELVA CORP7 citations72
US6660089B2Dec 9, 2003

Substrate support mechanism and substrate rotation device

ANELVA CORP12 citations71

CANON ANELVA CORP

3 patents
US10738380B2Aug 11, 2020

Deposition apparatus

CANON ANELVA CORP2 citations70
US7770714B2Aug 10, 2010

Transfer apparatus

CANON ANELVA CORP6 citations60
US9896760B2Feb 20, 2018

Deposition apparatus

CANON ANELVA CORP0 citations46

CANON ANELVA CORPOREATION

1 patent
US9346171B2May 24, 2016

Substrate transport apparatus, and system and method for manufacturing electronic device

CANON ANELVA CORPOREATION6 citations65

WATANABE KAZUHITO

1 patent
US8912697B2Dec 16, 2014

Vacuum actuator including a stator forming a part of a vacuum partition wall

WATANABE KAZUHITO0 citations30

HAGIWARA ITARU

1 patent
US8534975B2Sep 17, 2013

Substrate transport apparatus and method for manufacturing magnetic recording medium

HAGIWARA ITARU0 citations23