Inventor
LEE CHANG-HSIAO
TW4 patents
Patents
4 patentsUS8735295B2May 27, 2014
Method of manufacturing dual damascene structure
LEE CHANG-HSIAO2 citations58
US8277674B2Oct 2, 2012
Method of removing post-etch residues
LEE CHANG-HSIAO0 citations47
US8137472B2Mar 20, 2012
Semiconductor process
LEE CHANG-HSIAO0 citations47
US8592304B2Nov 26, 2013
Method for filling metal
LEE CHANG-HSIAO0 citations37