Inventor
SUGIHARA TARO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SUGIHARA TARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
6 patentsUS10222708B2Mar 5, 2019
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
NIKON CORP1 citations72
US9348238B2May 24, 2016
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
NIKON CORP1 citations62
US9298108B2Mar 29, 2016
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
NIKON CORP2 citations62
US9223231B2Dec 29, 2015
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
NIKON CORP0 citations51
US9223230B2Dec 29, 2015
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
NIKON CORP0 citations51
US8054465B2Nov 8, 2011
Position measurement method
NIKON CORP0 citations51
YASUDA MASAHIKO
3 patentsUS8072578B2Dec 6, 2011
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
YASUDA MASAHIKO551 citations98
US8059260B2Nov 15, 2011
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
YASUDA MASAHIKO8 citations91
US8576379B2Nov 5, 2013
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
YASUDA MASAHIKO4 citations72