Inventor
RASHEED MUHAMMAD
US28 patents
⚠️ This page may combine multiple inventors who share the name “RASHEED MUHAMMAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
17 patentsUS6764265B2Jul 20, 2004
Erosion resistant slit valve
APPLIED MATERIALS INC30 citations89
US9689070B2Jun 27, 2017
Deposition ring and electrostatic chuck for physical vapor deposition chamber
APPLIED MATERIALS INC6 citations84
US9633824B2Apr 25, 2017
Target for PVD sputtering system
APPLIED MATERIALS INC7 citations84
US7789993B2Sep 7, 2010
Internal balanced coil for inductively coupled high density plasma processing chamber
APPLIED MATERIALS INC8 citations84
US7572647B2Aug 11, 2009
Internal balanced coil for inductively coupled high density plasma processing chamber
APPLIED MATERIALS INC10 citations84
US7141138B2Nov 28, 2006
Gas delivery system for semiconductor processing
APPLIED MATERIALS INC13 citations83
US9177763B2Nov 3, 2015
Method and apparatus for measuring pressure in a physical vapor deposition chamber
APPLIED MATERIALS INC9 citations81
US10692706B2Jun 23, 2020
Methods and apparatus for reducing sputtering of a grounded shield in a process chamber
APPLIED MATERIALS INC3 citations73
US9534286B2Jan 3, 2017
PVD target for self-centering process shield
APPLIED MATERIALS INC4 citations72
US9957601B2May 1, 2018
Apparatus for gas injection in a physical vapor deposition chamber
APPLIED MATERIALS INC3 citations71
US11915917B2Feb 27, 2024
Methods and apparatus for reducing sputtering of a grounded shield in a process chamber
APPLIED MATERIALS INC1 citations62
US11011676B2May 18, 2021
PVD buffer layers for LED fabrication
APPLIED MATERIALS INC0 citations61
US9343274B2May 17, 2016
Process kit shield for plasma enhanced processing chamber
APPLIED MATERIALS INC2 citations61
US7848076B2Dec 7, 2010
Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing
APPLIED MATERIALS INC3 citations59
US10718049B2Jul 21, 2020
Process kit shield for improved particle reduction
APPLIED MATERIALS INC0 citations52
US11944988B2Apr 2, 2024
Multi-zone showerhead
APPLIED MATERIALS INC0 citations51
US7498268B2Mar 3, 2009
Gas delivery system for semiconductor processing
APPLIED MATERIALS INC1 citations51
RASHEED MUHAMMAD
4 patentsUS8911601B2Dec 16, 2014
Deposition ring and electrostatic chuck for physical vapor deposition chamber
RASHEED MUHAMMAD8 citations83
US8647485B2Feb 11, 2014
Process kit shield for plasma enhanced processing chamber
RASHEED MUHAMMAD4 citations71
US9834840B2Dec 5, 2017
Process kit shield for improved particle reduction
RASHEED MUHAMMAD1 citations51
US8795488B2Aug 5, 2014
Apparatus for physical vapor deposition having centrally fed RF energy
RASHEED MUHAMMAD1 citations51