Inventor
CHEN XUE GLORIA
US5 patents
Patents
5 patentsUS10032719B2Jul 24, 2018
Semiconductor device structures
MICRON TECHNOLOGY INC16 citations92
US9184058B2Nov 10, 2015
Methods of forming patterns by using a brush layer and masks
MICRON TECHNOLOGY INC6 citations82
US9418848B2Aug 16, 2016
Methods of forming patterns with a mask formed utilizing a brush layer
MICRON TECHNOLOGY INC4 citations71
US10522461B2Dec 31, 2019
Semiconductor device structures
MICRON TECHNOLOGY INC0 citations51
US9396996B2Jul 19, 2016
Methods of forming openings in semiconductor structures
MICRON TECHNOLOGY INC0 citations51