Inventor
YABUKI NORIHITO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “YABUKI NORIHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOYO TANSO CO
7 patentsUS9644894B2May 9, 2017
Semiconductor device manufacturing apparatus
TOYO TANSO CO6 citations71
US10388536B2Aug 20, 2019
Etching method for SiC substrate and holding container
TOYO TANSO CO1 citations59
US10014176B2Jul 3, 2018
SiC substrate treatment method
TOYO TANSO CO1 citations50
US9991175B2Jun 5, 2018
Method for estimating depth of latent scratches in SiC substrates
TOYO TANSO CO1 citations50
US9704733B2Jul 11, 2017
Storing container, storing container manufacturing method, semiconductor manufacturing method, and semiconductor manufacturing apparatus
TOYO TANSO CO1 citations50
US9570306B2Feb 14, 2017
Surface treatment method for single crystal SiC substrate, and single crystal SiC substrate
TOYO TANSO CO1 citations50
US10665485B2May 26, 2020
Heat treatment vessel for single-crystal silicon carbide substrate and etching method
TOYO TANSO CO0 citations49