Inventor
KODAIRA YOSHIMITSU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KODAIRA YOSHIMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
10 patentsUSRE40951ENov 10, 2009
Dry etching method for magnetic material
CANON ANELVA CORP23 citations89
US9734989B2Aug 15, 2017
Method for manufacturing semiconductor device, ion beam etching device, and control device
CANON ANELVA CORP3 citations70
US9190287B2Nov 17, 2015
Method of fabricating fin FET and method of fabricating device
CANON ANELVA CORP3 citations61
US9640754B2May 2, 2017
Process for producing magnetoresistive effect element
CANON ANELVA CORP0 citations50
US10026591B2Jul 17, 2018
Method for manufacturing semiconductor device, ion beam etching device, and control device
CANON ANELVA CORP1 citations49
US10546720B2Jan 28, 2020
Ion beam processing device
CANON ANELVA CORP0 citations48
US9984854B2May 29, 2018
Ion beam processing method and ion beam processing apparatus
CANON ANELVA CORP0 citations48
US7981805B2Jul 19, 2011
Method for manufacturing resistance change element
CANON ANELVA CORP1 citations46
US9773973B2Sep 26, 2017
Process for producing magnetoresistive effect element and device producing method
CANON ANELVA CORP0 citations38
US10388491B2Aug 20, 2019
Ion beam etching method of magnetic film and ion beam etching apparatus
CANON ANELVA CORP0 citations36