Inventor
LEUNG KING PUI
US4 patents
Patents
4 patentsUS10802208B2Oct 13, 2020
Broad spectrum radiation by supercontinuum generation using a tapered optical fiber
ASML HOLDING NV3 citations70
US10670978B2Jun 2, 2020
Method and apparatus for spectrally broadening radiation
ASML HOLDING NV4 citations70
US10082740B2Sep 25, 2018
Feedback control system of an alignment system
ASML HOLDING NV3 citations70
US11835752B2Dec 5, 2023
Broad spectrum radiation by supercontinuum generation using a tapered optical fiber
ASML HOLDING NV0 citations56