Inventor
Abraham Mathew Cheeran
US5 patents
Patents
5 patentsUS9888554B2Feb 6, 2018
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV9 citations80
US10362664B2Jul 23, 2019
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV2 citations69
US11013096B2May 18, 2021
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV0 citations59
US11690159B2Jun 27, 2023
Apparatus and method for extending target material delivery system lifetime
ASML NETHERLANDS BV0 citations58
US10477662B2Nov 12, 2019
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV0 citations48