Inventor
EVANS DAVID ROBERT
US6 patents
Patents
6 patentsUS9888554B2Feb 6, 2018
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV9 citations80
US11347154B2May 31, 2022
Cleaning a structure surface in an EUV chamber
ASML NETHERLANDS BV3 citations70
US10362664B2Jul 23, 2019
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV2 citations69
US12189313B2Jan 7, 2025
Cleaning a structure surface in an EUV chamber
ASML NETHERLANDS BV0 citations59
US11013096B2May 18, 2021
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV0 citations59
US10477662B2Nov 12, 2019
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV0 citations48