Inventor
GAZZA JACK MICHAEL
US5 patents
⚠️ This page may combine multiple inventors who share the name “GAZZA JACK MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS9888554B2Feb 6, 2018
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV9 citations80
US10362664B2Jul 23, 2019
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV2 citations69
US11013096B2May 18, 2021
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV0 citations59
US10477662B2Nov 12, 2019
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
ASML NETHERLANDS BV0 citations48