Inventor
CROOK KATHRINE
GB8 patents
Patents
8 patentsUS11802341B2Oct 31, 2023
PE-CVD apparatus and method
SPTS TECHNOLOGIES LTD2 citations65
US11251037B2Feb 15, 2022
Method of depositing silicon nitride
SPTS TECHNOLOGIES LTD0 citations59
US10309014B2Jun 4, 2019
Method of cleaning a plasma processing device
SPTS TECHNOLOGIES LTD1 citations57
US12077863B2Sep 3, 2024
PE-CVD apparatus and method
SPTS TECHNOLOGIES LTD0 citations55
US12500081B2Dec 16, 2025
Method of deposition
SPTS TECHNOLOGIES LTD0 citations51
US12131899B2Oct 29, 2024
Method of deposition
SPTS TECHNOLOGIES LTD0 citations51
US10096468B2Oct 9, 2018
Method of improving adhesion
SPTS TECHNOLOGIES LTD0 citations50
US9165762B2Oct 20, 2015
Method of depositing silicone dioxide films
SPTS TECHNOLOGIES LTD1 citations47