Inventor
BURGESS STEVE
GB14 patents
⚠️ This page may combine multiple inventors who share the name “BURGESS STEVE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPTS TECHNOLOGIES LTD
12 patentsUS11718908B2Aug 8, 2023
DC magnetron sputtering
SPTS TECHNOLOGIES LTD0 citations59
US11251037B2Feb 15, 2022
Method of depositing silicon nitride
SPTS TECHNOLOGIES LTD0 citations59
US11961722B2Apr 16, 2024
Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition
SPTS TECHNOLOGIES LTD0 citations57
US11913109B2Feb 27, 2024
Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition
SPTS TECHNOLOGIES LTD1 citations57
US11521840B2Dec 6, 2022
Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition
SPTS TECHNOLOGIES LTD0 citations57
US11008651B2May 18, 2021
DC magnetron sputtering
SPTS TECHNOLOGIES LTD0 citations56
US12488969B2Dec 2, 2025
Deposition apparatus
SPTS TECHNOLOGIES LTD0 citations49
US12043891B2Jul 23, 2024
Deposition method of a metallic layer on a substrate of a resonator device
SPTS TECHNOLOGIES LTD0 citations49
US12207556B2Jan 21, 2025
Method of deposition
SPTS TECHNOLOGIES LTD0 citations47
US11361975B2Jun 14, 2022
Method of fabricating integrated circuits
SPTS TECHNOLOGIES LTD0 citations47
US10978291B2Apr 13, 2021
Pre-cleaning a semiconductor structure
SPTS TECHNOLOGIES LTD0 citations43
US10812035B2Oct 20, 2020
SAW device and method of manufacture
SPTS TECHNOLOGIES LTD0 citations39