Inventor

EGAMI MIKI

JP21 patents

⚠️ This page may combine multiple inventors who share the name “EGAMI MIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EGAMI MIKI

JGC CATALYSTS & CHEMICALS LTD

Silica particle dispersion liquid and production method thereof

Silica particle dispersion liquid and production method thereof

Dispersion liquid of silica particles, polishing composition, and method for producing dispersion liquid of silica particles

Porous silica particles and method for producing same

Coating liquid for formation of protective film for semiconductor processing and method for preparation of the same

Silica particle liquid dispersion and production method therefor

Method for producing disintegrated silica particles

Method for producing chain-like particle dispersion, and dispersion of chain-like particles

Dispersion liquid of silica particles and production method therefor

Production method for dispersion liquid of silica particle

Silica particle dispersion and production method of the same

Silica-based polishing particle and abrasive

Silica-based polishing particle and abrasive

CATALYSTS & CHEM IND CO

Coating liquid for forming a silica-containing film with a low-dielectric constant and substrate coated with such a film

Coating liquid for forming low-permittivity silica film and substrate having low-permittivity coating film

Process for producing semiconductor substrates

Method of forming a silica-containing coating film with a low dielectric constant and semiconductor substrate coated with such a film

EGAMI MIKI

Coating liquid for forming low dielectric constant amorphous silica-based coating film and the coating film obtained from the same

Method for forming amorphous silica-based coating film with low dielectric constant and thus obtained amorphous silica-based coating film

FUJITSU LTD

Method of forming amorphous silica-based coating film with low dielectric constant and thus obtained silica-based coating film

NAKASHIMA AKIRA

Coating liquid for forming amorphous silica-based coating film with low dielectric constant