Inventor
NOTENBOOM ARNOUD WILLEM
NL25 patents
Patents
25 patentsUS10983431B2Apr 20, 2021
Pellicle and pellicle assembly
ASML NETHERLANDS BV5 citations83
US10466585B2Nov 5, 2019
Pellicle and pellicle assembly
ASML NETHERLANDS BV4 citations83
US11287737B2Mar 29, 2022
Metal-silicide-nitridation for stress reduction
ASML NETHERLANDS BV5 citations82
US10571800B2Feb 25, 2020
Mask assembly and associated methods
ASML NETHERLANDS BV9 citations82
US9939737B2Apr 10, 2018
Electrostatic clamp
ASML NETHERLANDS BV6 citations78
US11971654B2Apr 30, 2024
Metal-silicide-nitridation for stress reduction
ASML NETHERLANDS BV1 citations71
US11686997B2Jun 27, 2023
Metal-silicide-nitridation for stress reduction
ASML NETHERLANDS BV1 citations71
US11635681B2Apr 25, 2023
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations71
US11029595B2Jun 8, 2021
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations71
US11231646B2Jan 25, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV1 citations70
US10908496B2Feb 2, 2021
Membrane for EUV lithography
ASML NETHERLANDS BV3 citations70
US9494875B2Nov 15, 2016
Chuck, a chuck control system, a lithography apparatus and a method of using a chuck
ASML NETHERLANDS BV4 citations70
US11467486B2Oct 11, 2022
Graphene pellicle lithographic apparatus
ASML NETHERLANDS BV4 citations69
US12066758B2Aug 20, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11347142B2May 31, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11947256B2Apr 2, 2024
Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing
ASML NETHERLANDS BV1 citations61
US12474629B2Nov 18, 2025
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US11762281B2Sep 19, 2023
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US12117726B2Oct 15, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US11754918B2Sep 12, 2023
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US11314163B2Apr 26, 2022
Pellicle frame and pellicle assembly
ASML NETHERLANDS BV1 citations59
US12197139B2Jan 14, 2025
Object holder, tool and method of manufacturing an object holder
ASML NETHERLANDS BV1 citations58
US12436454B2Oct 7, 2025
Pellicle membrane
ASML NETHERLANDS BV0 citations53
US12072620B2Aug 27, 2024
Method of manufacturing a membrane assembly
ASML NETHERLANDS BV0 citations48
US9429857B2Aug 30, 2016
Electrostatic clamp, lithographic apparatus and method
ASML NETHERLANDS BV1 citations48