Inventor
WILEY JAMES NORMAN
US11 patents
Patents
11 patentsUS8056028B2Nov 8, 2011
Method of performing mask-writer tuning and optimization
ASML NETHERLANDS BV15 citations84
US10983431B2Apr 20, 2021
Pellicle and pellicle assembly
ASML NETHERLANDS BV5 citations83
US10466585B2Nov 5, 2019
Pellicle and pellicle assembly
ASML NETHERLANDS BV4 citations83
US10571800B2Feb 25, 2020
Mask assembly and associated methods
ASML NETHERLANDS BV9 citations82
US11635681B2Apr 25, 2023
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations71
US11029595B2Jun 8, 2021
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations71
US11086213B2Aug 10, 2021
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations69
US10139725B2Nov 27, 2018
Lithographic apparatus
ASML NETHERLANDS BV6 citations69
US12066758B2Aug 20, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11347142B2May 31, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11287748B2Mar 29, 2022
Guided patterning device inspection
ASML NETHERLANDS BV0 citations58