Inventor
RUDOLPH DIRK
US10 patents
Patents
10 patentsUS10633742B2Apr 28, 2020
Use of voltage and current measurements to control dual zone ceramic pedestals
LAM RES CORP6 citations81
US11028482B2Jun 8, 2021
Use of voltage and current measurements to control dual zone ceramic pedestals
LAM RES CORP3 citations70
US10453651B2Oct 22, 2019
Methods and systems for determining a fault in a gas heater channel
LAM RES CORP1 citations70
US9960009B2May 1, 2018
Methods and systems for determining a fault in a gas heater channel
LAM RES CORP1 citations60
US10294560B2May 21, 2019
High-conductance, non-sealing throttle valve with projections and stop surfaces
LAM RES CORP1 citations59
US12146795B2Nov 19, 2024
Temperature monitoring
LAM RES CORP0 citations50
US12000887B2Jun 4, 2024
Wireless electronic-control system
LAM RES CORP0 citations49
US10770263B2Sep 8, 2020
Methods and systems for determining a fault in a gas heater channel
LAM RES CORP0 citations49
US11853026B2Dec 26, 2023
Configurable distributed-interlock-system
LAM RES CORP0 citations38
US10210977B2Feb 19, 2019
Valve operation booster
LAM RES CORP0 citations33