Inventor

TERAYAMA MASATOSHI

JP8 patents

⚠️ This page may combine multiple inventors who share the name “TERAYAMA MASATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

4 patents

US8908150B2Dec 9, 2014

Substrate processing method, manufacturing method of EUV mask, and EUV mask

TOSHIBA KK0 citations50

US8383298B2Feb 26, 2013

Substrate processing method, manufacturing method of EUV mask, and EUV mask

TOSHIBA KK0 citations50

US8017287B2Sep 13, 2011

Development method, method of manufacturing photomask, and method of manufacturing semiconductor device

TOSHIBA KK1 citations50

US9116431B2Aug 25, 2015

Development processing apparatus

TOSHIBA KK0 citations39

KIOXIA CORP

2 patents

US11833550B2Dec 5, 2023

Substrate processing apparatus and substrate processing method

KIOXIA CORP2 citations69

US12172194B2Dec 24, 2024

Substrate processing apparatus and substrate processing method

KIOXIA CORP0 citations59

SAKURAI HIDEAKI

1 patent

US8672563B2Mar 18, 2014

Development method, method of manufacturing photomask, method of manufacturing semiconductor device and development device

SAKURAI HIDEAKI0 citations48

TOSHIBA MEMORY CORP

1 patent

US9841674B2Dec 12, 2017

Patterning method, and template for nanoimprint and producing method thereof

TOSHIBA MEMORY CORP0 citations45